3D Profiler with 3 different technologies for data capture.
Using 3 technologies in 1: Confocal, Interferometry, Ai Focus Variation
Versatile System for Quality Control and R&D
High speed 3D profiling
Ai Focus Variation
Saving each layer as the lens moves upward allowing you to see shape and curvature.
Only allowing focused light through allowing you to see surface structure.
Using a laser allows very accurate measurement down to nanometers great for shiny surfaces such as wafers.
Automated modules have been created to facilitate all QC procedures.
Data acquisition is taken at 180 fps. Standard measurement acquisition is 5X faster than before. Making the S neox the fastest areal measurement system in the market.
Easy To Use
Now in it’s 5th generation, the S neox has been designed to be easy to use, intuitive and faster. Even if you are beginner user, the system can be managed with just one click.
Research & Development
Ideal for all lab environments, without limitations. The three measurement techniques found in the S neox sensor head –Confocal, Interferometry, Ai Focus Variation– each contribute critically to the versatility of the system.
Thin film measurement technique measures the thickness of optically transparent layers quickly, accurately, non-destructively and requires no sample preparation. Transparent films from 50 nm to 1.5 μm can be measured in less than one second. Sample evaluation spot diameter is dependent on the objective magnification which can be as low as 0.5 μm and up to 40 μm.
Sensofar proprietary algorithms deliver nanometer level system noise for any measurements technique at the highest possible lateral resolution for an optical instrument. The topography shown is a subnanometer (0.3 nm) atomic layer. Courtesy of PTB.
Extended Measurements Module
SensoSCAN’s extended measurements module allows the user to easily define the measurement layout on the surface by means of the overview image. The area can be automatically cropped to rectangular, circular or ring areas of interest. Wide areas up to 500 million pixels are possible. Several scanning strategies such us autofocusing on each field, or focus tracking to minimise vertical scanning range are available.