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Micro-Vu Excel

Automated bridge-type Optical CMM with 2.5μm accuracy & 0.05μm resolution for large parts.

Key Information

Measuring Capacity
Stage Capacity
Linear Resolution
1600 x 2560 x 160mm
2.8 μm
0.05 μm


  • Medium and large parts
  • Machined parts
  • Moulds
  • Plastics
  • Artwork / PCB masks

The Micro-Vu Excel bridge-type system accommodates large parts with a capacity of up to 660x715x400mm. With highly-accurate and fast measurement, the large stage is great for multiple part measurement as well as larger components. These multisensor measuring centres employ optical, touch probe and laser technologies to handle demanding measurement applications.

The illumination options make measuring otherwise hard-to-measure shiny parts simple. The measurement system accommodates large parts and fixtures of multiple parts while maintaining a relatively small footprint.


Tactile – Touch Probes:

Optical CMM Touch Probe Option

    • Automated probe calibrations.
    • Automatic approach vectoring and docking.
    • High sensitivity, low triggering force probes available.

Laser – Laser Probes:

Optical CMM Laser Attachment

    • Point and path data.
    • Graphical range display.
    • Automated laser calibrations.
    • High sampling rate.
    • Fast Z measurements.
    • Surfaces or points.

Rotary – Rotary Indexer:

Optical CMM Rotary Indexer Option

    • Vertical and horizontal mounting.
    • Faceplate and chuck included.
    • Automated rotary calibration.
    • W-Axis part rotation.
    • Automated calibration.


Product Variants

  • Micro-Vu Vertex: The same technology as the Excel in a bench-top CMM. With an accuracy from 2 microns, this is ideal for measuring smaller components.
  • Micro-Vu Sol: The same technology as the Excel with manual stage and optical head movement via turning wheels.



We can design and manufacture fixtures for you to make measuring one or multiple parts efficient. Contact us for more information.

Inspec Metrology Software 

All systems include our InSpec Metrology Software. Providing point-and-click simplicity, proprietary edge detection, advanced lighting control and calibration, multi-sensor integration, automated calibrations, and a clear display of measurement data and tolerances. It makes measuring easy.

  • Simple User Interface: Camera window, feature summary & log, part schematic, program list and icons
  • Powerful Image Tools: Manual and focus Point; best, first and closest edge; line; arc; circle; ellipse scans; profile circle; closed profile; open and closed follower; O-ring tool and through-point.
  • Automated Calibrations
  • Temperature Compensation
  • Data Import / Export: DXF Import and export, 2D & 3D data point export, other importers are available such as Gerber, Excellon & IGES, auto-export to file, serial port, printer, & ODBC.


Contact Sempre to discuss your measuring challenge.

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