A QA/QC and R&D solution engineered for speed. 3D profiling to the nanometer with 3 optical technologies and the ability to measure smooth and shiny surfaces.
The S Neox measures using confocal, interferometry and focus variation techniques. For the measurement of roughness, surface finish, flatness and waviness on materials such as thin film and wafers.
- Ai focus variation – Saves each layer as the lens moves upward allowing you to see shape and curvature.
- Confocal – Only allows focused light through allowing you to see the surface structure.
- Interferometry – Uses a laser to allow very accurate measurement down to nanometers great for shiny surfaces such as wafers.
- Spectroscopic Reflectometry: Perform thickness measurements on transparent layers in a quick, accurate and non-destructive way.